304不锈钢化学机械抛光工艺参数研究

为优化抛光效果、节省成本及提高效率，研究抛光压力、抛光液流量、抛光转速和抛光时间对304不锈钢材料去除率和表面粗糙度的影响。实验结果表明:在抛光压力为13.79 kPa、抛光液流量为15 mL/min、抛光时间为35 min、抛光转速为60 r/min的工艺条件下，304不锈钢去除速率达到226.56 nm/min，表面粗糙度降至6 nm，既节约了成本又保证了最好的表面粗糙度和较高的材料去除速率。 

Chemical mechanical polishing process parameters of 304 stainless steel

When chemical-mechanically polishing 304 stainless steel,the effects of polishing pressure,polishing slurry flow rate,polishing speed and polishing time on the material removal rate and surface roughness are studied for better performance,lower cost and higher efficiency.Experimental results show that the material removal rate reaches 226.56 nm/min and the surface roughness reduces to 6nm at the condition of polishing pressure 13.79 kPa,slurry flow rate 15 mL/min,polishing time 35 min,and polishing speed 60 r/min,which ensures the best surface rough degree and higher material removal rate.