非球面碳化硅反射镜往复式磨削面形精度建模及仿真

为优化圆弧面砂轮磨削非球面碳化硅反射镜的加工效果，基于往复式磨削对非球面反射镜的残余高度进行建模，通过残余高度与面形精度的几何关系，建立面形精度预测模型并进行仿真分析。面形精度模型仿真结果表明:随截圆弧长增加或倾角增大，面形精度降低；随砂轮基圆半径增加或砂轮圆弧半径增加，面形精度提高。其中，截圆弧长和砂轮基圆半径对面形精度影响较大。 

Modeling and simulation of surface form accuracy for aspheric SiC mirror based on reciprocating grinding

To study the performance of grinding aspheric SiC mirror with arc-shaped grinding wheel,the model of residual height of aspheric silicon carbide mirror is established based on the reciprocating grinding,and the prediction model of surface form accuracy is simulated and analyzed through the relationship between the residual height and the surface form accuracy.Resultsshow that the surface form accuracy decreases with the increase of cutting arc length and inclination angle,and that the accuracy is improved with the increase of base circle radius or arc radius of grinding wheel.The cutting circular arc length and base circle radius of grinding wheel have great influence on surface form accuracy.