| 微泵的结构与流体分析 |
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| 引用本文： | 贾建援,黄新波,康春霞.微泵的结构与流体分析[J].微纳电子技术,2004,41(5):41-44. |
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| 作者姓名： | 贾建援 黄新波 康春霞 |
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| 作者单位： | 西安电子科技大学机电工程学院,陕西,西安,710071 |
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| 摘 要： | 利用扩散阀/喷嘴的流体特性设计了一种无活动阀压电式微泵;应用小挠度弹性弯曲理论,导出圆形压电复合层薄板的弹性曲面微分方程和复合层薄板的中性面位置方程;应用压电理论导出压电薄膜的边缘电场分布;应用微流体力学理论导出微泵单次循环的净流量。结合华盛顿大学的压电式微泵模型理论算出其最大流量为958μl/min,与其试验结果相吻合。
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| 关 键 词： | 扩散阀 微泵 压电效应 流量 |
| 文章编号： | 1671-4776(2004)05-0041-04 |
| 修稿时间： | 2003年9月18日 |
Analysis on the structure and hydrokinetics of micropump |
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| JIA Jian yuan,HUANG Xin bo,KANG Chun xia.Analysis on the structure and hydrokinetics of micropump[J].Micronanoelectronic Technology,2004,41(5):41-44. |
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| Authors: | JIA Jian yuan HUANG Xin bo KANG Chun xia |
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| Abstract: | A new valve?鄄less piezoelectric micropump was designed on the flow?鄄direction properties of diffuser and nozzle elements. Some elastic curved surface differential equations and neutral planes of circular piezoelectric composite laminates are derived from the elastic thin plate bending theory with small deflection. The edge electric field distribution of piezoelectric laminates was gained by piezoelectricity. A total pumped volume during a pump cycle is calculated by micro?鄄hydrokinetics and a maximum pumped volume which is 958 μl/min combining a piezoelectric micropump model fabricated by Washington University agrees well with their experienced results. |
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| Keywords: | diffuser micropump piezoelectric effects pumped volume |
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