| 基于实时误差补偿的精密定位系统的研究 |
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| 引用本文： | 孙立宁,晏祖根.基于实时误差补偿的精密定位系统的研究[J].组合机床与自动化加工技术,2006(1):16-18. |
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| 作者姓名： | 孙立宁 晏祖根 |
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| 作者单位： | 哈尔滨工业大学,机器人研究所,哈尔滨,150001 |
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| 摘 要： | 介绍了基于实时误差补偿的精密定位系统的组成，分析了系统的偏摆振动模型，讨论了偏摆误差检测原理。利用有限元软件ANSYS。设计了采用双层平行板弹性铰链结构、基于PZT直接驱动的微驱动补偿工作台。实验结果证明，采用实时误差补偿技术，定位系统的运动性能得到较大提高。
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| 关 键 词： | 误差补偿 定位系统 微驱动 压电陶瓷 |
| 文章编号： | 1001-2265(2006)01-0016-03 |
| 收稿时间： | 2005-07-27 |
| 修稿时间： | 2005年7月27日 |
Research of Precision Positioning System Based on Real-time Error Compensation |
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| SUN Li-ning,YAN Zu-gen.Research of Precision Positioning System Based on Real-time Error Compensation[J].Modular Machine Tool & Automatic Manufacturing Technique,2006(1):16-18. |
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| Authors: | SUN Li-ning YAN Zu-gen |
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| Affiliation: | Robotics Institute, Harbin Institute of Technology, Harbin 150001, China |
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| Abstract: | The precision positioning system based on real-time error compensation was presented. The yaw vibration model and method of yaw error measurement was discussed. Based on simulation by finite element analysis, the PZT driven micro-table was designed. Experimental results proved that the motion performance of the positioning table was improved by applied the micro-table to compensate yaw error. |
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| Keywords: | error compensation positioning system micro-driven PZT |
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