Ferroelectric and dielectric properties of sol-gel derived BaxSr1−xTiO3 thin films

Ferroelectric thin films of Ba_0.7Sr_0.3TiO₃, Ba_0.8Sr_0.2TiO₃, Ba_0.9Sr_0.1TiO₃ and BaTiO₃ were fabricated by a modified sol-gel technique on Pt/Ti/SiO₂/Si substrates. All the compositions crystallized in perovskite structure and consist of well-defined grains. As the value of x increases grain size of the Ba_xSr_1−xTiO₃ thin films increases while the dielectric permittivity decreases. Ba_0.7Sr_0.3TiO₃ composition possesses the highest dielectric permittivity of 748 (at 100 kHz). Hysteresis loops measured at room temperature for all compositions showed that BaTiO₃ has the largest remnant polarization of 4.8 μC/cm². The dielectric and ferroelectric properties of the sol-gel derived Ba_xSr_1−xTiO₃ thin films are strongly dependent on the Sr content and the grain size.