Comparative study of electron beam-gas interaction in an SEM operating at pressures up to 300 Pa |
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Authors: | A KadounR Belkorissat B KhelifaC Mathieu |
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Affiliation: | a Laboratoire d’Elaboration et de Caractérisation des Matériaux, Département de Physique, Faculté des Sciences, Université Djilali Liabès, BP 89, Sidi Bel Abbès 22000, Algeriab Faculte Jean perrin, Centre de Calcul et de Modélisation de Lens, Université d’Artois, SP 18 Rue Jean Souvraz, Lens Cedex 62307, France |
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Abstract: | The effects of three different gas environments formed by pure argon, helium and nitrogen with variable pressures up to 300 Pa inside the specimen chamber of a scanning electron microscope on the electron beam parameters were investigated and compared using Monte Carlo calculations. The calculations show that the skirt of the electron beam probe is nearly independent of pressure in the case of helium, which is also supported by experimental evidence. Both theoretical simulation and experimental facts indicate helium as the environment of choice in specimen chambers for minimizing the effect of beam-gas interactions. |
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Keywords: | Low vacuum SEM ESEM Electron beam-gas interaction Ionization |
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