一种基于光学杠杆的新型精密角度传感器研究

在精密角度传感器中,灵敏度和噪声性能是影响传感器精度的主要因素.为了提高角度传感器的灵敏度和噪声性能水平,采用以光学杠杆为基础,与萨格纳克效应(Sagnac)干涉仪结合的方法来建立一种新型的精密角度传感器.Sagnac干涉仪的干涉图样在相消干涉时对2个相干光束的光路差很敏感,而光学杠杆又可将光路差放大,从而提高灵敏度.同时,Sagnac干涉仪的相消干涉能抑制某些噪声源,从而提高噪声性能.通过实验仿真,验证了这种方法构建的精密角度传感器具有较高的灵敏度和噪声性能水平.

Study on a New Type of Precision Angle Sensor Based on Optical Lever

In precision angle sensor, the sensitivity and noise performance are two factors influencing the sensor accuracy. In order to improve the sensitivity and noise performance of the angle sensor,a new type of precision angle sensor has been built by combing the optical lever with Sagnac interferometer. The interference pattern of the Sagnac interferometer are very sensitive to the path difference of two coherent beam in the destructive interference, at the same time, the optical lever can amplify the beam path difference thus the sensitivity can be improved. Furthermore, the destructive interference of the Sagnac interferometer can suppress some noise source and then the noise performance can be improved. The simulation results show that the proposed precision angle sensor based on the optical lever has high sensitivity and high noise performance.