以Cu-Ti复合渗镀为先导的Si3N4陶瓷/金属钎焊连接

提出一种陶瓷表面多元离子复合渗镀合金化方法,采用该方法对Si3N4陶瓷表面进行Cu-Ti复合渗镀,然后在复合渗镀真空设备中进行渗镀Cu-Ti的Si3N4陶瓷与金属的钎焊.对Si3N4陶瓷表面的Cu-Ti渗镀合金层进行了EDS、XRD、SEM、OM测试分析和声发射划痕试验.结果表明,渗镀层中含有Cu、Ti、Fe、Si及Al元素,Cu、Ti分布比较均匀,渗镀合金层由Cu、CuTi2、TiSi2组成;声发射划痕试验结果表明,在100 N的最大载荷下,渗镀合金层与陶瓷基体未发生剥离和崩落现象.在100倍的光学显微镜及5000倍的电子显微镜下,钎焊接头中陶瓷/金属界面接合良好,无明显的宏观和微观缺陷.可在较低的真空度下实现陶瓷/金属钎焊,为陶瓷/金属钎焊连接提供了一个新方法.

Cu-Ti composite diffusion coating for joining Si3N4 ceramic to metal

A method of multiple ion compounds diffusion coating alloy(MICDCA) technology was put forward.The alloy-layer was directly deposited on the Si_3N_4 ceramic surface by MICDCA method,and brazing of Cu-Ti alloying ceramic to metal was realized with MICDCA.The diffusion coating was tested by energy dispersive spectrometer,X-ray diffractometer,scanning electron microscope,optical microscope and anchoring strength scratching test.It was indicated that diffusion coating consist of Cu,Ti,Fe,Si and Al element,and Cu and Ti distributed uniformly.The diffusion coating was made up of Cu_2Ti,Cu,TiSi_2,and anchoring strength of deposited and substrate was well,under the maximum of 100 N,the diffusion coating did not stripped and avalanched from the ceramic substrate.Si_3N_4 ceramic with diffusion coating was joined to metal,and the joining was analyzed using 100 times optical microscope and 5 000 times scanning electron microscope.It was indicated that joining strength was well and there were not obvious macroscopic and microcosmic defects.The method was carried out in a comparatively low vacuum and provided a new method for joining ceramic to metal.