四自由度压电自感知微夹钳的设计

为提高压电微夹钳操作的灵活性，省掉用于检测其位移的外部传感器，该文设计了一种新型的四自由度压电微夹钳，并采用自感知方法获得其钳指位移。首先，基于两组空间垂直交叉的横向逆压电效应，设计了在夹持方向和垂直夹持方向上同时运动的四自由度压电微夹钳新结构；其次，基于压电晶片在电压作用下发生变形的同时在其表面产生电荷的思想，提出了电荷积分的自感知方法获取压电微夹钳的钳指位移；最后，通过实验测试了压电微夹钳的静动态特性及位移自感知特性。实验结果表明，基于自感知方法获得的位移与基于传感器获得的结果具有较好的一致性。

Design of Four Degree of Freedom Piezoelectric Self-Sensing Microgripper

In order to improve the flexibility of piezoelectric microgripper operation and eliminate the external sensor used to detect its displacement, a novel four degree of freedom piezoelectric microgripper is designed in this paper, and its finger displacement is obtained by self-sensing method. Firstly, based on the transverse inverse piezoelectric effect of two sets of spatial vertical intersection, a new structure of four degree of freedom piezoelectric microgripper is designed, which moves simultaneously in the clamping direction and the vertical clamping direction. Secondly, based on the idea that the piezoelectric wafer deforms under the action of voltage while generates charges on its surface, a self-sensing method of charge integration is proposed to obtain the finger displacement of piezoelectric microgripper. Finally, the static and dynamic characteristics as well as the displacement self-sensing characteristics of piezoelectric microgripper are tested through experiments. The experimental results show that the displacement obtained by self-sensing method is in good agreement with the results obtained by sensor.