|
|||||
|
|
Precise Control of Temperature Rising Speed of Wafer during Rapid Thermal Processing |
|
| Authors: | Shigeki Hirasawa Tsuyoshi Kawanami Katsuaki Shirai Tetsuya Urimoto Naoki Morimoto Atsushi Fujiwara Sadanori Toda |
| Affiliation: | Department of Mechanical Engineering, Kobe University, Kobe 657-8501, Japan |
| Abstract: | Electronic equipment manufacturing, rapid heating, heat treatment, temperature control, PID control. |
| Keywords: | Electronic equipment manufacturing rapid heating heat treatment temperature control PID control. |
| 本文献已被 维普 等数据库收录！ | |