| 利用FCVA法和CO2、N2制备Ti(C,O,N)纳米复合薄膜的研究 |
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| 引用本文： | 侯庆艳,沈永青,伏开虎,周晗,英敏菊,张旭,廖斌. 利用FCVA法和CO2、N2制备Ti(C,O,N)纳米复合薄膜的研究[J]. 稀有金属材料与工程, 2017, 46(12): 3606-3612 |
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| 作者姓名： | 侯庆艳 沈永青 伏开虎 周晗 英敏菊 张旭 廖斌 |
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| 作者单位： | 北京师范大学,,,,,北京师范大学, |
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| 基金项目： | 国家自然科学基金项目（面上项目，重点项目，重大项目） |
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| 摘 要： | 使用CO2和N2利用磁过滤阴极弧法（FCVA）在Si（100）和304不锈钢上沉积Ti(C,N,O)薄膜。采用XPS, XRD, Raman, SEM, 摩擦磨损试验机，电化学实验站检测得出气体流速对薄膜成分、相结构和薄膜性能的作用。当混合气体流量从10sccm升高的50sccm时，薄膜中的C和N含量有明显增加，而O和Ti含量有小幅下降；当混合气体流量从50sccm升高到80sccm时，薄膜中的C和N含量下降，而Ti含量有小幅上升，O含量急剧上升。薄膜由nc-Ti(C,N,O)纳米晶结构，转变为nc-Ti(C,N,O)/a-CNx，a-TiO2/a-CNx,N-doped a-TiO2/a-C纳米复合结构。N-doped a-TiO2/a-C纳米复合结构薄膜具有最低的摩擦系数（0.34），nc-Ti(C,N,O)/a-CNx，N-doped a-TiO2/a-C纳米复合结构薄膜在Hanks溶液中均表现出良好的抗腐蚀能力。
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| 关 键 词： | Ti(C,N,O) 磁过滤阴极弧法 CO2 腐蚀 纳米复合 |
| 收稿时间： | 2016-10-17 |
| 修稿时间： | 2016-12-14 |
The study of Ti(C, N, O) nanocomposite films fabricated by Filtered Cathodic Vacuum Arc using CO2 and N2 as precusors |
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| Hou Qingyan,Shen Yongqing,Fu Kaihu,Zhou Han,Ying Minju,Zhang Xu and Liao Bin. The study of Ti(C, N, O) nanocomposite films fabricated by Filtered Cathodic Vacuum Arc using CO2 and N2 as precusors[J]. Rare Metal Materials and Engineering, 2017, 46(12): 3606-3612 |
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| Authors: | Hou Qingyan Shen Yongqing Fu Kaihu Zhou Han Ying Minju Zhang Xu Liao Bin |
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| Affiliation: | Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center,Key Laboratory of Beam Technology and Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing Radiation Center |
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| Abstract: | Ti(C,N,O) films were deposited on Si (100), 304 stainless steel by Filtered Cathodic Vacuum Arc (FCVA) using CO2 and N2 (with ratio of 1:1) as precusors. The effect of gas flow rate on the composition, phase structure and properties of films was investigated by XPS, XRD, Raman, SEM, Tribological Test and Electrochemical workstation. The contents of C and N increase obviously, while contents of O and Ti decrease slightly as the gas flow rate increasing from 10sccm to 50sccm. The contents of C and N decrease, while content of Ti increases slightly and content of O increases dramatically as the gas flow rates from 50sccm to 80sccm. The phase structure of Ti(C,N,O) films transformed from nc-Ti(C,N,O) nanocrystal structure to nc-Ti(C,N,O)/a-CNx nanocomposite structure, a-TiO2/a-CNx and N-doped a-TiO2/a-C nanocomposite structure as gas flow rate increasing from 10sccm to 80sccm. The N-doped a-TiO2/a-C nanocomposite showed the lowest friction coefficient. Both nc-Ti(C,N,O)/ a-CNx nanocomposite structure and N-doped a-TiO2/a-C nanocomposite structure showed good anticorrosion ability in Hanks balance solution. |
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| Keywords: | Ti(C,N,O) Filtered arc CO2 corrosion nanocomposite |
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