| MEMS壁剪应力传感器热效应的数值模拟 |
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| 引用本文： | 许正,李万平. MEMS壁剪应力传感器热效应的数值模拟[J]. 传感器与微系统, 2006, 25(12): 32-34,38 |
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| 作者姓名： | 许正 李万平 |
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| 作者单位： | 华中科技大学,土木工程与力学学院,湖北,武汉,430074 |
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| 摘 要： | 借助计算流体动力学(CFD)商业软件FLUENT,采用数值模拟的方法,对基于MEMS的壁剪应力传感器热交换效应进行了分析。计算结果表明:在壁剪应力传感器的热膜下方加入真空腔或者空气腔是十分必要的。针对水流中测量的计算结果显示,真空腔和空气腔在整个计算区域的温度场分布以及对流体的传热效率的差别不大,而空腔可以明显地减小底层的热损失,这对提高剪应力传感器的灵敏度是十分有利的。此外,MEMS壁剪应力传感器的尺寸效应对传热效率也存在影响。
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| 关 键 词： | 微机电系统 壁剪应力 传感器 热效应 数值模拟 |
| 文章编号： | 1000-9787（2006）12-0032-03 |
| 收稿时间： | 2006-05-20 |
| 修稿时间： | 2006-05-20 |
Numerical simulation for the thermal effect of MEMS wall shear stress sensors |
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| XU Zheng,LI Wan-ping. Numerical simulation for the thermal effect of MEMS wall shear stress sensors[J]. Transducer and Microsystem Technology, 2006, 25(12): 32-34,38 |
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| Authors: | XU Zheng LI Wan-ping |
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| Affiliation: | College of Civil Engineering and Mechanics, Huazhong University of Science and Technology, Wuhan 430074, China |
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| Abstract: | The thermal effect of MEMS wall shear stress sensors is analyzed by using the computational fluid dynamics(CFD) commercial software FLUENT.The simulating results demonstrate that it is very necessary to add a vacuum cavity or an air cavity beneath the hot-film of MEMS wall shear stress sensors.The result of calculation in flowing water shows that the difference between the effects of the vacuum cavity and the air cavity is very small in the temperature distribution and the heat transfer rate to the flowing water,and the vacuum cavity can signally reduce the heat lost irretrievably to the substrate,which is very necessary to improve the sensitivity of wall shear stress sensors.In additional,the geometry of sensors also influence the heat transfer rate of wall shear stress sensors. |
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| Keywords: | MEMS wall shear stress sensor thermal effect numerical simulation |
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