低温等离子体处理SF_6废气综述

低温等离子体废气处理技术正越来越引起人们的重视,它是未来环保产业的重要发展方向。由于强温室气体SF_6本身的理化特性,等离子体处理SF_6面临着更多的挑战,目前该方面的研究综述鲜见。本文尝试根据国内外已有的文献资料,阐述了等离子体处理SF_6的反应机理和其三个评价指标,从射频、微波和介质阻挡放电三种主要的处理SF_6的等离子体出发论述了降解过程各个因素对降解率、能量效率以及最终降解产物的影响。同时,提出了等离子体处理SF_6需要进一步解决的问题和今后的研究方向,并对其工业化进行了可行性分析。

A Review of Degradation of SF6 Waste by Low Temperature Plasma

The low temperature plasma technology for waste gas treatment attracts more and more attention. It becomes an important tendency in future’s environmental protection industry. Due to the physical and chemical properties, the treatment of the strong greenhouse gas SF6 by plasma is faced with more challenges. However, the related researches have rarely been reviewed so far. This paper describes the reaction mechanism as well as three evaluation indexes of plasma treatment of SF6. According to three main plasma treatment methods including radio frequency, microwave and dielectric barrier discharge, the influences of various factors on the destruction and removal efficiency, energy yield and the final byproducts were then comprehensively overviewed. Moreover, the further issues and the future research directions were also presented. Finally, the feasibility of its industrialization was analyzed.