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皮秒激光加工工艺对微沟槽表面的疏水性研究
引用本文:李元可,魏昕,汪永超,赵忠伟,李亮,张亮. 皮秒激光加工工艺对微沟槽表面的疏水性研究[J]. 激光技术, 2022, 46(3): 301-306. DOI: 10.7510/jgjs.issn.1001-3806.2022.03.002
作者姓名:李元可  魏昕  汪永超  赵忠伟  李亮  张亮
作者单位:广东工业大学 机电工程学院, 广州 510006
摘    要:为了研究紫外皮秒激光在均热板基板表面刻蚀微沟槽后,不同激光工艺参数对微沟槽表面疏水性的影响规律,采用Cassie-Baxter模型进行了理论分析,并利用单因素实验法,改变激光扫描速率、激光扫描间距、光斑横向重叠次数进行实验验证.结果表明,降低固-液区域面积占比、宽度或缩短沟槽间距,均可以提升微沟槽表面的疏水性能;造成微...

关 键 词:激光技术  激光刻蚀  皮秒激光  微沟槽  疏水性
收稿时间:2021-04-26

Study on hydrophobicity of micro-groove surface by picosecond laser processing
Abstract:To study the influence of different laser processing parameters on the surface hydrophobicity of the micro grooves etched by an ultraviolet picosecond laser on the surface of a soaking plate, a Cassie-Baxter model were constructed. By using the method of single factor experiment, the change rate of laser scanning, laser scanning spacing, speckle transverse overlapping times was experimentally verified, respectively. The results show that the hydrophobicity of the surface of micro-grooves can be improved by reducing the ratio of solid-liquid area and the width of the grooves or shortening the distance between the grooves. The main reasons for the surface hydrophobicity of micro-grooves are the internal micro-nano structure and the adsorbed hydrophobic chemical groups during processing. When the laser scanning rate is 125mm/s, the laser scanning interval is 200μm, and the spots overlap twice, the surface of the micro-grooves etched by ultraviolet picosecond laser has the strongest hydrophobicity. This study provides a reference for enhancing the hydrophobic performance of the condensing end of the soaking plate and improving its over all circulation efficiency.
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