玻璃材料激光加工技术的研究进展

玻璃材料因其优良、独特的理化性能在半导体、微流控芯片、微机电系统、光通讯及光存储等新兴领域有广泛的应用。激光技术作为一种新型非接触加工方法，可以对玻璃材料表面或其内部进行高精度、高效率的微加工，在玻璃材料加工领域展现出巨大潜力。归纳了激光刻蚀、激光打孔、激光焊接及激光制备功能结构4种典型的激光加工玻璃工艺的基本原理及关键问题，指出了玻璃材料激光加工的最新研究进展、工艺水平及应用现状，其中激光刻蚀包括了激光直写刻蚀、激光诱导等离子体刻蚀与激光背部湿法刻蚀; 激光打孔包括了远红外CO₂激光打孔、超快激光打孔及改进的打孔方法；激光焊接玻璃工艺包括远红外CO₂激光焊接、纳秒激光焊接、超快激光焊接，以及激光制备表面和内部3维功能结构。同时总结了4类激光加工玻璃工艺的优缺点，分析了目前的瓶颈问题。在此基础上，对激光加工玻璃材料的发展前景进行总结和展望。

Research progress of laser processing technology for glass materials

Glass materials are widely used in semiconductor, micro-electromechanical system, microfluidic chip, optical communication, optical storage, and other emerging fields due to its excellent and unique physical and chemical properties. As a new non-contact machining method, laser technology can carry out high-precision and high-efficiency micro-machining on the surface and inside of glass materials, which shows great development potential in the field of glass material processing. In this paper, the basic principle and key problems of four typical laser machining glass processes: Laser etching, laser drilling, laser welding, and laser fabrication of functional structures were reviewed. And the latest research progress, technological level, and application status of laser processing of glass materials were pointed out. Laser etching includes laser direct-writing etching, laser-induced plasma-assisted ablation, and laser-induced backside wet etching; laser drilling includes far-infrared CO₂ laser drilling, ultrafast laser drilling, and improved new drilling methods; laser welding includes far-infrared CO₂ laser welding, nanosecond laser welding, and ultrafast laser welding; while laser fabrication of functional structures was divided into surface functional structures fabrication and internal functional structures fabrication. At the same time the advantages and disadvantages of four kinds of laser machining glass processes were summarized, and the bottleneck problems were analyzed. On this basis, the development prospect of laser processing technology for glass materials is summarized and prospected.