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显微成像系统分辨率问题讨论(特邀)
引用本文:党诗沛,李润泽,周美玲,千佳,但旦,于湘华,姚保利.显微成像系统分辨率问题讨论(特邀)[J].红外与激光工程,2022,51(11):20220735-1-20220735-8.
作者姓名:党诗沛  李润泽  周美玲  千佳  但旦  于湘华  姚保利
作者单位:1.中国科学院西安光学精密机械研究所 瞬态光学与光子技术国家重点实验室,陕西 西安 710119
基金项目:国家自然科学基金(62005309,62105359);中国博士后科学基金(2020M673522);陕西省自然科学基础研究(2021JQ-325);陕西省重点研发计划(2021GY-079,2020SF-193);西安市博士后创新基地资助项目(2021-08)
摘    要:空间分辨率是光学显微成像系统的核心指标,根据光学衍射理论,成像系统的空间分辨率由照明光波长与显微物镜的数值孔径共同决定。而在实际成像过程中,根据不同判据得出的显微成像系统分辨率略有差异,需要根据光源的相干性和被观测目标的结构等特征选择合适的判据来准确计算成像系统分辨率。通过理论分析和数值模拟,给出了不同情况下成像分辨率的计算方法,并对比了在相干光源和非相干光源照明下,对双缝目标和双点目标成像时成像分辨率的差异。

关 键 词:光学显微成像    相干光和非相干光照明    分辨率判据
收稿时间:2022-10-12

Discussion on spatial resolution of microscopic imaging system (invited)
Affiliation:1.State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an 710119, China2.University of Chinese Academy of Sciences, Beijing 100049, China
Abstract:Spatial resolution is a key specific parameter of the optical microscopic imaging system. According to the optical diffraction theory, the spatial resolution of imaging system is determined by the wavelength of illumination light and the numerical aperture of microscope objective. In the practical imaging process, the resolutions of microscopic imaging system obtained from different criteria are slightly different. It is necessary to select an appropriate criterion according to the coherence of light sources and the structural characteristics of obsversed targets to accurately calculate the resolutions of imaging system. In this paper, the calculation methods for spatial resolution under different conditions are provided via theoretical analysis and numerical simulation. Furthermore, we compare and discusse the difference of imaging resolutions under the illuminations of coherent and incoherent light sources for double points and double slits targets, respectively.
Keywords:
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