基于微球透镜远场超分辨率成像方法研究

在可见光波段，传统光学显微镜的成像分辨率被限制到200nm。为了突破衍射极限，采用了将微球与传统光学显微镜相结合的方法来获得远场超分辨率成像。首先通过理论分析平行光通过微纳结构物体后物光波在空气中的传输，进而分析微球将倏逝波转换成传输波实现远场超分辨的成像机理；其次通过仿真研究了微球的光纳米喷射特性，可知微球光纳米喷射的半径尺寸小于入射光波长的一半；最后搭建了基于微球与传统光学显微镜相结合的超分辨率成像实验系统。结果表明，将蓝光光盘作为被测物体，通过该成像系统可获得100nm的远场超分辨率成像; 该成像系统可以对微纳元件结构进行检测。这一结果对光刻技术、生物医学等领域是有帮助的。

Far-field super-resolution imaging based on microsphere lens

The imaging resolution of a conventional optical microscope is limited to 200nm by the diffraction in the visible spectrum. In order to overcome the resolution limit of the imaging, the microsphere combing with the traditional optical microscope was used to obtain the super-resolution imaging in far field. Firstly, the transport of the object light waves in the air was analyzed theoretically after the parallel light interacted with the micro-nano structure object, and the mechanism of the far-field super-resolution imaging was analyzed that the evanescent wave was converted into the transmission wave by the microsphere. Secondly, the photonic nanojet characteristics of the microspheres were researched. The results show that the radius of the photonic nanojet by the microsphere is less than half of the incident wavelength. Lastly, the blue-ray disc was used as the object, the experimental system of the super-resolution imaging based on the microsphere combining with traditional optical microscope was set up. The resolution of the imaging system is 100nm in the far-field. The results show that the imaging system can be used in the detection of the micro-nano structure. The results are helpful to the lithography, bio-medicine, etc.