微流控芯片通道的全息显微检测方法

针对微流控芯片通道和缺陷的检测要求，设计构建了一套基于预放大离轴光路的反射式像面数字全息显微实验系统。探讨了数字全息显微测量中横向尺寸在视场占比较大的低空间频率物体的相位畸变矫正方法，提出两步相位相减法更适用于该类型物体的相位畸变矫正。通过宽度为55 μm、高度为65 nm的台阶标准样板实验对两步相位相减法、一般多项式曲面拟合法和Zernike高阶多项式曲面拟合法在相位畸变矫正效果上进行对比分析，分析结果表明两步相位相减法矫正畸变后的台阶平均高度相对误差为1.1%，较其他方法的误差更小，畸变矫正效果更好。另外，实验以通道宽度为80 μm的微流控芯片为被测样件，实现了芯片通道以及通道表面断裂型和缺损型缺陷的三维形貌检测，并得到定量结果:断裂型缺陷的宽度为14.1 μm，深度为431.7 nm；缺损型缺陷的宽度为33.6 μm，深度为295.1 nm。实验结果表明:像面数字全息显微实验系统为微流控芯片通道及表面缺陷的快速无损测量提供了新的途径，对于微流控实验系统质量评价具有重要意义。

Holographic microscopy detection method of microfluidic chip channel

Aiming at the detection requirements of the microfluidic chip channel and defect detection, a set of reflective image-plane digital holographic microscopic system based on the pre-amplified off-axis optical path was designed and constructed. In the digital holographic microscopy measurement, the phase distortion correction method of the low-spatial frequency objects whose lateral size occupies a relatively large field of view was discussed, and the two-step phase subtraction method was proposed to be more suitable for the phase distortion correction of this type of object. The phase distortion correction effects of two-step phase subtraction method, general polynomials surface fitting method and Zernike high-order polynomials surface fitting method were compared and analyzed through the experiment of a micro-step standard sample with a width of 55 μm and a height of 65 nm. The analysis results show that the relative error of the average height of the micro-step after the distortion is corrected by the two-step phase subtraction method is 1.1%, which is smaller than other methods and has a better distortion correction effect. In addition, the microfluidic chip with a channel width of 80 μm was used as the sample to detect the three-dimensional shape of the micro-channel, the fracture defect and defective defect on the surface of the channel. The quantitative results show that the width of the fracture defect is 14.1 μm and the depth is 431.7 nm. The defective defect has a width of 33.6 μm and a depth of 295.1 nm. The experimental results show the image-plane digital holographic microscopic system provides a new way for the rapid and non-destructive measurement of microfluidic chip microchannels and surface defects, which is of great significance for the quality evaluation of microfluidic experimental systems.