基于激光加工的玻璃透镜阵列制备

为了实现蓝宝石微透镜阵列模板的可控制备，采用刻蚀辅助激光加工技术得到了形貌可控、排列均匀的密排步蓝宝石微凹透镜阵列模板，并结合高温浇铸转写技术实现了K9玻璃微凸透镜阵列的快速制备；基于蓝宝石和玻璃之间较大的热膨胀系数差，实现了蓝宝石和玻璃的有效分离。结果表明，所制备的玻璃透镜阵列具有较高的表面平滑度，表面粗糙度仅有2nm，同时保持了高达80%的透过率，在可见波段，对于不同波长的光都展现了清晰的聚焦和成像效果；通过氢氟酸的清洁处理，蓝宝石透镜阵列模板可以实现重复利用。刻蚀辅助激光加工结合高温浇铸转写技术能够实现高平滑玻璃微透镜阵列的快速制备，该技术为硬质材料微纳器件的快速制备提供了参考。

Fabrication of glass microlens arrays by laser-based technology

In order to realize the controllable fabrication of sapphire microlens array templates, an etching-assisted laser machining technology was used, a compact sapphire concave microlens array template with controllable morphology and uniform arrangement was obtained. And by combining with the high-temperature casting transfer technology, the rapid preparation of K9 glass convex microlens array was realized; based on the large difference in thermal expansion coefficients between sapphire and glass, the separation of the sapphire template and the glass microlens array plate was realized. The results indicate that the surface roughness of the transferred glass microlens arrays is approximately 2nm, meanwhile, it exhibits high transmittance of up to 80% and shows clear focusing and imaging properties for light of different wavelengths in the visible range. In addition, the sapphire template can be reused with HF solution cleaned. Etching-assisted laser processing combined with high temperature casting transcribing technology can realize the rapid preparation of highly smooth glass microlens array. This technique provides a reference for the rapid preparation of micro-nano-devices with hard materials.