显微激光诱导电流技术研究进展

随着光电器件的研究步入微米/纳米尺度，显微激光诱导电流(LBIC)技术作为一种半导体器件的无损、快速、可成像的表征技术得到迅速发展。显微LBIC技术可表征局域光照激励下器件的光电转换性能，起初被用于检测器件中的不均匀性或缺陷。近年来，将显微LBIC技术与其他显微成像技术相关联，进行器件多物理参量的综合表征，为研究微纳尺度上的材料-结构-器件性能关系提供了有效手段。基于这一表征手段的进步，光伏器件中微观晶体结构与性能的关系研究、全新机理的低维光伏/探测器件研究、以及微纳结构的光伏/探测增强研究等均得到了蓬勃发展。文中综述了显微LBIC技术的研究进展，首先介绍显微LBIC的基本模型及分类，随后聚焦于LBIC与其他多种显微成像的关联表征技术，并探讨该类技术在光伏器件和光电探测器件研究方面的应用。最后展望了显微LBIC及其关联成像技术的未来发展方向。

Research progress of laser-beam-induced current microscopy technology

As the research of optoelectronic devices has stepped into the micro/nano scale, the laser-beam-induced current (LBIC) microscopy technology has developed rapidly as a non-destructive, fast, and imageable characterization technology for semiconductor devices. LBIC microscopy enable studying for photoelectric conversion performance of devices under local illumination excitation, and is initially used to detect inhomogeneities or defects in the devices. In recent years, the LBIC microscopy technology has been correlated with other microscopic imaging technologies to perform comprehensive characterization of the multi-physical parameters of the device, which provides an effective strategy for studying the relationship between material-structure-device performance at the micro-nano scale. Based on the advancement of this characterization strategy, researches on the relationship between microscopic crystal structure and performance in photovoltaic devices, new mechanisms of low-dimensional photovoltaics and detection devices, and micro/nanostructure for photovoltaics and photodetection enhancement have all been vigorously developed. Herein, the research progress of LBIC microscopy was reviewed, firstly the basic model and classification of LBIC microscopy were introduced, then the technology and its development in correlation with other types of microscopic imaging were focused on. And further the application of this type of technology in photovoltaic devices and photodetectors was discussed. At last, future development directions of LBIC microscopy and the correlated microscopic imaging technology were prospected.