高性能硅基微流道优化方法研究

采用激光刻蚀工艺制备了硅基微流道散热器，通过半导体微细加工技术将薄膜温度传感器集成到微流道内部。通过实验测试了不同流量以及不同加热功率下，激光刻蚀微流道和深反应离子刻蚀微流道的散热能力。结果表明，微流道内壁的粗糙表面能降低热阻，在相同条件下比深反应离子刻蚀微流道小一半。集成在微流道散热器内部的薄膜温度传感器能准确、实时捕获微流道内的温度变化，真实地反映了微流道的温度分布特性，为优化微流道设计提供了新的技术途径。

Study of Optimization Method on Silicon-Based Microchannel

The silicon microchannel in this paper is fabricated by laser process. The thin-film temperature sensors are integrated in the internal surface of microchannel by micro-machined technique. The heat dissipation performances of microchannel fabricated by laser process and deep reactive iron etching (DRIE) are experimentally tested respectively in different flow rates and heat fluxes. The experiment results represent that the rough internal surface of microchannel can effectively decrease the thermal resistance. Under the same condition, the thermal resistance can reduce by almost 50% when compared with the microchannel heat sink fabricated by DRIE. The temperature sensors integrated in microchannel can accurately capture temperature change in real time and reflect the temperature distribution in microchannel. It provides a new method to optimize the design of microchannel.