硒化锌晶体的高效率高质量组合抛光方法（特邀）

硒化锌晶体作为常用的红外晶体材料，广泛应用于红外光学系统中。为了提高硒化锌晶体的加工质量及加工效率，提出了将磁流变抛光（MRF）与传统数控抛光(CCOS)技术相结合的方法，通过多组正交实验配置硒化锌晶体的磁流变抛光液，对一块口径为50 mm的硒化锌晶体展开磁流变抛光，再针对磁流变抛光后的表面痕迹进行传统数控抛光，在正压力为0.05~0.1 MPa范围内，经过30 min均匀抛光，硒化锌晶体的表面粗糙度由3.832 nm降低到1.57 nm，粗糙度得到明显改善。该方法有效提高了非球面硒化锌晶体的加工效率并改善了加工后的表面质量，对硒化锌晶体的非球面超精密加工具有重要的参考价值。

High-efficiency and high-quality combined polishing method of zinc selenide crystal (invited)

As an excellent infrared crystal material, zinc selenide crystal is widely used in infrared optical systems. In order to improve the processing quality and processing efficiency of zinc selenide crystal, a method combining magnetorheological polishing (MRF) and traditional numerical control polishing (CCOS) technology was proposed, and the magnetic current of zinc selenide crystal was configured through multiple sets of orthogonal experiments. Change the polishing liquid, carry out magnetorheological polishing on a zinc selenide crystal with a diameter of 50 mm, and then perform traditional numerical control polishing on the surface traces after magnetorheological polishing. The positive pressure is in the range of 0.05-0.1 MPa. Uniform polishing after 30 minites, the surface roughness of the zinc selenide crystal was reduced from 3.832 nm to 1.57 nm, and the roughness was significantly improved. The method effectively improves the processing efficiency of aspheric zinc selenide crystals and improves the surface quality after processing, and has important reference value for aspheric ultra-precision processing of zinc selenide crystals.