小口径深度凸非球面的高精度面形检测

凸非球面反射镜在反射式光学系统中的应用非常广泛，但其面形高精度检测一直是光学制造领域的难题。为了实现小口径、深度凸非球面的面形高精度检测，提出了一种基于计算全息图（Computer Generated Hologram，CGH）的零位干涉检测技术。首先，详细阐述了该技术的检测原理和方法，给出了计算全息中补偿测试全息和对准标记全息设计过程中的技术要点；然后结合工程应用，针对口径15 mm、顶点曲率半径11.721 mm、非球面度达到72 μm的深度凸非球面，设计并制造了相应的CGH补偿元件，完成了相应零位干涉检测系统的搭建和检测实验；最后，与Luphoscan的检测结果交叉对比，验证了该检测方法的准确性。该技术为小口径凸非球面的高精度检测提供了一种有效的方法，具有显著的工程应用价值。

High-precision shape measurement technology for convex aspheric with small aperture and large convex asphericity

Convex aspherical mirrors are widely used in reflective optical systems, but high-precision shape measurement technology is always a difficult problem in optical manufacturing. In order to achieve high- precision detection of convex aspheric with small aperture and large asphericity, a null test interference detection technique based on computer generated hologram (CGH) was proposed. Firstly, the detection principle and method of this technology were described in detail, and the key technical points in the processing of testing CGH and alignment CGH design were given. Then, combined with engineering application, the corresponding CGH was designed and manufactured for convex aspheric with the aperture of 15 mm, the vertex curvature radius of 11.721 mm and its asphericity of 72 μm, and the null test interference detection experiments based on CGH were completed. Finally, the accuracy of the proposed method was verified by cross-comparison with Luphoscan detection technique. This technology provides an effective method for high-precision testing of small aperture convex aspheric and has significant engineering application value.