采用单位激励与逆向复算的2 m平面镜检测技术

为解决Φ2 m平面镜高精度面形检测问题，并提高瑞奇-康芒检测方法的可靠性，研究了一种基于单位激励法与逆向复算的Φ2 m平面镜面形检测技术。分析了在气流扰动、球面镜面形等误差源对单位激励面形计算方法的影响；采用单位激励与光学软件逆向复算相结合的方式，提高瑞奇康芒-检测方法的可靠性。仿真分析2 m平面镜检测过程中气流变化对面形恢复的影响，结果显示:在气流影响情况下，经过多次平均计算面形解算稳定性保持在0.003λ；在球面镜面形影响情况下，面形计算精度达到0.0079λ。采用这种方法，对实际Φ2 m平面镜进行面形加工过程控制，面形检测结果显示该平面镜的RMS达到0.0415λ，PV为0.2040λ（λ=632.8 nm）。该研究旨在解决误差影响情况下大口径平面镜面形检测问题，对于实际镜面加工、检测具有重要的应用意义。

2 m plane mirror measurement technology using unit excitation and reverse calculation

In order to solve the problem of high-precision surface shape detection of Φ2 m plane mirror and improve the reliability of the Ricky-Common detection method, a Φ2 m plane mirror surface shape detection technology based on unit excitation method and inverse complex calculation was studied. The influence of error sources such as airflow disturbance and spherical mirror surface shape on the calculation method of unit excitation surface shape was analyzed. The combination of unit excitation and optical software inverse complex calculation was used to improve the reliability of the Ricky-Commonn detection method. The effect of airflow change on surface shape recovery during the detection of Φ2 m plane mirror was simulated and analyzed. The results show that under the influence of airflow, the stability of surface shape calculation remains at 0.003λ after multiple average calculations. The surface shape calculation the accuracy reaches 0.0079λ under the influence of spherical mirror shape. Using this method, the surface shape processing process of the actual Φ2 m plane mirror was controlled, and the surface shape detection results showed that the RMS of the plane mirror reached 0.0415λ, and the PV was 0.2040λ (λ=632.8 nm). The purpose of this research is to solve the problem of shape detection of large-diameter plane mirrors under the influence of errors, which has important application significance for actual mirror processing and detection.