| 基于大面积TFT和PVDF薄膜的表面形貌无损探测技术 |
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| 引用本文： | 尚飞,胡潇然,张千,刘帅,向勇.基于大面积TFT和PVDF薄膜的表面形貌无损探测技术[J].电子科技大学学报（自然科学版）,2020,49(2):287-290. |
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| 作者姓名： | 尚飞 胡潇然 张千 刘帅 向勇 |
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| 作者单位： | 电子科技大学材料与能源学院 成都 611731 |
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| 摘 要： | 针对物体表面形貌无损探测，提出了一种基于大面积薄膜晶体管(TFT)和聚偏氟乙烯(PVDF)薄膜的表面形貌探测方法，具有大面积、可覆形、便携化和高精度的特点。该方法利用电容传感器原理，将已广泛应用于半导体显示领域的TFT阵列与传感器相结合，可精确定位物体表面微米级缺陷，测量分辨率达到50 μm，实现了对物体表面形貌的精准无损探测。
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| 关 键 词： | 聚偏氟乙烯 传感器 表面形貌探测 薄膜晶体管 |
| 收稿时间： | 2019-09-21 |
Nondestructive Detection of Surface Morphology Based on Large-Area TFT and PVDF Films |
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| Affiliation: | School of Materials and Energy, University of Electronic Science and Technology of China Chengdu 611731 |
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| Abstract: | Aiming at nondestructive detection of the surface morphology of objects, a method based on large-area thin-film transistor (TFT) arrays and poly(vinglidene) fluoride (PVDF) films was developed, which can cover a large area and different shapes while is also portable and highly accurate. This method applies the TFT array, which has been widely used in the semiconductor display field, to the sensor applications. The sensor combined with TFT arrays utilizes the principle of capacitive sensor to accurately detect the surface topography, which can accurately locate micron-level surface defects with a resolution of 50 μm. |
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