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Growth and characterization of indium tin oxide thin films deposited on PET substrates |
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| Authors: | Jaehyeong Lee Hakkee Jung Donggun Lim Junsin Yi |
| Affiliation: | a School of Electronics and Information Engineering, Kunsan National University, Kunsan, South Korea b Department of Electronic Engineering, Chungju National University, Chungju, South Korea c School of Information and Communication Engineering, Sungkyunkwan University, Suwon, South Korea d Department of Electrical Engineering, Kangwon National University, Samcheok, South Korea |
| Abstract: | Transparent and conductive indium tin oxide (ITO) thin films were deposited onto polyethylene terephthalate (PET) by d.c. magnetron sputtering as the front and back electrical contact for applications in flexible displays and optoelectronic devices. In addition, ITO powder was used for sputter target in order to reduce the cost and time of the film formation processes. As the sputtering power and pressure increased, the electrical conductivity of ITO films decreased. The films were increasingly dark gray colored as the sputtering power increased, resulting in the loss of transmittance of the films. When the pressure during deposition was higher, however, the optical transmittance improved at visible region of light. ITO films deposited onto PET have shown similar optical transmittance and electrical resistivity, in comparison with films onto glass substrate. High quality films with resistivity as low as 2.5 × 10− 3 Ω cm and transmittance over 80% have been obtained on to PET substrate by suitably controlling the deposition parameters. |
| Keywords: | Indium tin oxide (ITO) Sputtering Polyethylene terephthalate (PET) Electrical properties Optical properties |
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