| 对流-扩散传质对微电铸镀层均匀性的影响 |
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| 引用本文： | 陈晖,李光杨,汪红,王艳,丁桂甫,赵小林.对流-扩散传质对微电铸镀层均匀性的影响[J].传感器与微系统,2010,29(8). |
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| 作者姓名： | 陈晖 李光杨 汪红 王艳 丁桂甫 赵小林 |
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| 作者单位： | 上海交通大学微纳科学技术研究院微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室; |
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| 基金项目： | 上海市科委科研计划资助项目，国家重点实验室基金资助项目 |
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| 摘 要： | 利用有限元分析软件FLUENT对MEMS微电铸镀层均匀性进行了分析.对当物质传输成为金属沉积的控制步骤时,进行对流-扩散传质过程数值模拟,研究不同深宽比微结构中对流-扩散对传质的影响.模拟结果表明:当对流-扩散传质成为控制步骤时,渗透流影响镀层基本形貌,回流会引起镀层形貌的微小起伏.
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| 关 键 词： | 微电铸 对流-扩散传质 渗透流 回流 |
Effect of convective-diffusive mass transfer on coating uniformity electroforming |
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| CHEN Hui,LI Guang-yang,WANG Hong,WANG Yan,DING Gui-fu,ZHAO Xiao-lin.Effect of convective-diffusive mass transfer on coating uniformity electroforming[J].Transducer and Microsystem Technology,2010,29(8). |
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| Authors: | CHEN Hui LI Guang-yang WANG Hong WANG Yan DING Gui-fu ZHAO Xiao-lin |
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| Affiliation: | CHEN Hui,LI Guang-yang,WANG Hong,WANG Yan,DING Gui-fu,ZHAO Xiao-lin(National Key Laboratory of Micro/Nano Fabrication Technology,Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education,Research Institute of Micro/Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200240,China) |
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| Abstract: | MEMS micro-electroforming uniformity are analyzed using FLUENT software.The convective-diffusive mass transfer effects inside different high-aspect-ratio micro-structures are simulated when the mass transfer turns into the control step.The results of simulations show that when the mass transport is controlled mainly by convection and diffusion,the penetration flow within the cavity effects the bump shapes and the vortices flow effects the minor ups and downs. |
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| Keywords: | micro-electroforming convective-diffusive mass transfer penetration flow vortices flow |
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