A W‐band RF‐MEMS switched LNA in a 70 nm mHEMT process

This work presents a monolithic integrated reconfigurable active circuit consisting of a W‐band RF micro‐electro‐mechanical‐systems (MEMS) Dicke switch network and a wideband low‐noise amplifier (LNA) realized in a 70 nm gallium arsenide (GaAs) metamorphic high electron mobility transistor process technology. The RF‐MEMS LNA has a measured gain of 10.2–15.6 dB and 1.3–8.2 dB at 79–96 GHz when the Dicke switch is switched ON and OFF, respectively. Compared with the three‐stage LNA used in this design the measured in‐band noise figure (NF) of MEMS switched LNA is minimum 1.6 dB higher. To the authors’ knowledge, the experimental results represent a first time demonstration of a W‐band MEMS switched LNA monolithic microwave integrated circuit (MMIC) in a GaAs foundry process with a minimum NF of 5 dB. The proposed novel integration of such MEMS switched MMICs can enable more cost‐effective ways to realize high‐performance single‐chip mm‐wave reconfigurable radiometer front‐ends for space and security applications, for example. © 2015 Wiley Periodicals, Inc. Int J RF and Microwave CAE 25:639–646, 2015.