Reliability,detection limit and depth resolution of the elastic recoil measurement of hydrogen |
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| Affiliation: | 1. Department of Biology, University of Missouri, St. Louis One University Blvd, St. Louis, MO 63121, USA;2. Department of Ecology, Evolution, & Behavior, University of Minnesota, Twin Cities 1987 Upper Buford Circle, St. Paul, MN 55108, USA;1. Department of Mining, Faculty of Engineering, Urmia University, 5756151818 Urmia, Iran;2. Faculty of Mining Engineering, Sahand University of Technology, New Sahand Town, Tabriz, Iran;1. Shanghai Institute of Microsysterm and Information Technology, Chinese Academy of Sciences, Shanghai 200050, Peoples R China;2. Shanghai JiaoTong University, Shanghai, China;3. School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, Peoples R China;4. University of Chinese Academy of Sciences, Peoples R China |
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| Abstract: | Reliability, detection limit and depth resolution were studied in the elastic recoil measurement of hydrogen mainly in silicon compounds by bombardment with argon ions accelerated up to 50 MeV. For the quantitative determination of hydrogen, recoil silicon atoms proved to serve satisfactorily as an internal monitor. The detection limit was shown to be about 1 to 2×1012 (atoms/cm2 for hydrogen on surface and about 1 wt. ppm for hydrogen in bulk. The depth resolution was found to be about 50 nm in most silicon compounds. |
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