Micropore density in a-Si:H and a-Si:H:Cl films |
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| Affiliation: | Institute of Solid State Physics. Bulgarian Academy of Sciences, Boulevard Lenin 72, 1784 Sofia, Bulgaria |
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| Abstract: | a-Si:H films deposited from various silane-containing gas mixtures have been studied regarding their porosity. Micropore densities of 2.O × 102cm-2, 5.0 × 104cm-2 and 5.0 × 104cm-2 were determined for a-Si:H:C1, a-Si:H(H2) and a-Si:H(Ar) films, respectively. It is suggested that these values correlate with the structural properties of the films, so that a-Si:H:Cl films seem to be the most uniform on the microstructural scale. |
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