| 离子辅助蒸发TixOy制备氧化钛薄膜及特性 |
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| 引用本文： | 胡小锋,薛亦渝,郭爱云. 离子辅助蒸发TixOy制备氧化钛薄膜及特性[J]. 真空, 2005, 42(6): 36-38 |
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| 作者姓名： | 胡小锋 薛亦渝 郭爱云 |
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| 作者单位： | 武汉理工大学,湖北,武汉,430070 |
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| 摘 要： | 采用离子辅助沉积的方法,分别以TiO2和Ti3O5为初始膜料在K9玻璃上制备了氧化钛薄膜,并研究了离子束流密度对以Ti3O5为膜料制备的薄膜透射性能的影响.实验结果表明,热处理前薄膜都为无定形结构;热处理后有明显的锐钛矿结构(101)择优取向,以Ti3O5为初始膜料制备的薄膜吸收优于以TiO2为膜料制备的薄膜;薄膜透射率极值随束流密度增大有临界值.
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| 关 键 词： | 薄膜 束流密度 |
| 文章编号： | 1002-0322（2005）06-0036-03 |
| 收稿时间： | 2005-07-15 |
| 修稿时间： | 2005-07-15 |
Oxide-titanium films deposited by IAD process and their characteristics |
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| HU Xiao-feng,XUE Yi-yu,GUO Ai-yun. Oxide-titanium films deposited by IAD process and their characteristics[J]. Vacuum(China), 2005, 42(6): 36-38 |
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| Authors: | HU Xiao-feng XUE Yi-yu GUO Ai-yun |
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| Affiliation: | Wuhan university of technology, Wuhan 430070, China |
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| Abstract: | The oxide-titanium thin films were prepared by ion-beam assisted deposition(IAD) on K9 glasses with TiO_2 and Ti_3O_5 as coating materials.The effect of ion beam current intensity on the transmissivity of Ti_3O_5 films was investigated.The testing results showed that before heat treatment the two films are both of amorphous structure and that after heat-treatment they prasent(101) preferred orientation in anatase structure.The refractivity of Ti_3O_5 film deposited is higher than that of TiO_2 film.The transmissivity of the films will increase to a critical value with ion beam current density. |
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| Keywords: | TiO2 Ti3O5 |
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