Study of dilution of Spin-On Glass by Fourier transform infrared spectroscopy |
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Authors: | Miguel Dominguez Pedro RosalesAlfonso Torres Mario MorenoAbdu Orduña |
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Affiliation: | a National Institute for Astrophysics, Optics and Electronics (INAOE), Electronics Department, Luis Enrique Erro No. 1, Puebla 72840, Mexicob CIBA-Tlaxcala, Instituto Politécnico Nacional, Tepetitla, Tlax. 90700, Mexico |
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Abstract: | In this work, we study the dilution of Spin-On Glass (SOG) in order to obtain high quality SiO2 films at 200 °C, with optical and electrical characteristics similar to those of the thermally grown SiO2. For the production of SiO2 films we used 2-propanol and deionized water (DI) as diluents for the SOG and we compared the electrical and optical film properties with those of the films obtained from undiluted SOG. From Fourier transform infrared spectroscopy we observed a considerable reduction of Si OH (920 cm− 1), O H (3490 cm− 1) and C H, C O bonds (1139 cm− 1) in the films produced from SOG diluted with DI. Besides the above, the insulator breakdown field was approximately 21 MV/cm, the refractive index and the dielectric constant were close to those of the thermally grown SiO2. Our results suggest that the film produced from SOG diluted with DI and cured at 200 °C is an excellent candidate to be used as insulator on flexible and large-area electronics. |
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Keywords: | Fourier-transform infrared spectroscopy Spin-on glass Insulator Low-temperature |
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