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成型工艺对高介单层微波陶瓷电容器性能的影响
引用本文:吕贤亮,钟朝位,张树人. 成型工艺对高介单层微波陶瓷电容器性能的影响[J]. 电子元件与材料, 2010, 29(5). DOI: 10.3969/j.issn.1001-2028.2010.05.003
作者姓名:吕贤亮  钟朝位  张树人
作者单位:电子科技大学,电子薄膜与集成器件国家重点实验室,四川,成都,610054
摘    要:分别采用轧膜与流延两种成型工艺制备了SrTiO3高介单层微波陶瓷电容器材料,对比研究了两种成型工艺对其结构与性能的影响。研究表明:对于轧膜工艺而言,电容器陶瓷材料的εr和密度随着轧膜次数增加呈单峰效应,瓷料脱辊后轧膜70次左右可获得表面平整、结构致密、介电性能良好的电容器陶瓷材料。和流延工艺相比,轧膜工艺制备的电容器陶瓷材料εr较大,电容量温度变化率较小。

关 键 词:钛酸锶  高介单层微波电容器  轧膜工艺  流延工艺

Influence of forming process on the properties of single layer microwave ceramic capacitors with high permittivity
L Xianliang,ZHONG Chaowei,ZHANG Shuren. Influence of forming process on the properties of single layer microwave ceramic capacitors with high permittivity[J]. Electronic Components & Materials, 2010, 29(5). DOI: 10.3969/j.issn.1001-2028.2010.05.003
Authors:L Xianliang  ZHONG Chaowei  ZHANG Shuren
Affiliation:L(U) Xianliang,ZHONG Chaowei,ZHANG Shuren
Abstract:Single layer microwave ceramic capacitor materials of SrTiO3 with high permittivity was prepared by two kinds of forming process including roll forming process and tape-casting process.The effects of two kinds of forming process on the microstructure and properties of prepared capacitor materials were investigated.The results indicate that,the εr and density of capacitor materials have unimodal action with the increasing roll times,and the capacitor material prepared by the roll forming process with 70 roll times possesses flat surface,compact structure and good dielectric properties.Comparing with the tape-casting process,the capacitor material prepared by the roll forming process possesses larger εr,lower percentage of capacitance variation with temperature.
Keywords:SrTiO3  single layer microwave capacitor with high permittivity  roll forming process  tape-casting process
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