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Quality Assurance in Polysilicon Deposition Using Statistics |
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| Authors: | Mariano Aceves-Mijares Roberto Murphy-Arteaga Alfonso Torres-Jacome Wilfrido Calleja-Arriaga |
| Affiliation: | a Institute Nacional de Astrofisica Optica y Electronica Tonantzintla, Puebla, Mexico |
| Abstract: | |
| Keywords: | Polysilicon deposition Integrated circuits Low-pressure chemical vapor deposition (LPCVD) Taguchi techniques Orthogonal arrays Variance analysis (ANOVA) Variability reduction Control charts Moving-range charts |
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