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3D Direct Laser Writing of Highly Absorptive Photoresist for Miniature Optical Apertures
Authors:Michael D Schmid  Andrea Toulouse  Simon Thiele  Simon Mangold  Alois M Herkommer  Harald Giessen
Affiliation:1. 4th Physics Institute, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany;2. Research Center SCoPE, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany

Institute of Applied Optics (ITO), University of Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany;3. Research Center SCoPE, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany

Institute of Applied Optics (ITO), University of Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany

Printoptix GmbH, Johannesstraße 11, 70176 Stuttgart, Germany;4. 4th Physics Institute, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany

Research Center SCoPE, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany

Abstract:The importance of 3D direct laser writing as an enabling technology increased rapidly in recent years. Complex micro-optics and optical devices with various functionalities are now feasible. Different possibilities to increase the optical performance are demonstrated, for example, multi-lens objectives, a combination of different photoresists, or diffractive optical elements. It is still challenging to create fitting apertures for these micro optics. In this work, a novel and simple way to create 3D-printed opaque structures with a highly absorptive photoresist is introduced, which can be used to fabricate microscopic apertures increasing the contrast of 3D-printed micro optics and enabling new optical designs. Both hybrid printing by combining clear and opaque resists, as well as printing transparent optical elements and their surrounding opaque apertures solely from a single black resist by using different printing thicknesses are demonstrated.
Keywords:2-photon-polymerization  3D direct laser writing  3D printed apertures  micro-optics  opaque photoresists
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