基于MEMS微加工技术的高灵敏度隧道传感器的研究

基于硅加工的高灵敏微型隧道传感器在过去15年里得到了充分的发展.多种隧道传感器被开始出来,例如加速度计,角速度计,红外传感器,磁性传感器等.首先对基于硅加工的隧道传感进行了简单的总结.对四种传感器进行了总结和讨论,包括几种器件的结构设计,加工过程,器件性能,控制电路和系统噪音.特别介绍了一种新型的基于高分子聚合物的隧道加速度计,并讨论了其结构,加工与测试,隧道效应得到了进一步验证.同时给出了这种新型高灵敏传感器在很多领域的应用展望.

Highly sensitive micromachined tunneling sensors

Highly sensitive silicon micromachined tunneling sensors with small size and light mass have been widely explored in the last 15 years. Many types of tunneling sensors have been developed. This paper presents a review of silicon micromachined tunneling sensors. Four types of tunneling sensors including accelerometers, gyroscopes, infrared sensors, and magnetic sensors are reviewed. Various designs, fabrication procedures, performance, control systems, and noise constraints of silicon tunneling sensors are described and discussed. Novel polymer-based tunneling accelerometers fabricated by PMMA and hot embossing technique are introduced. The structure, fabrication process and characterization of the polymer-based sensor are presented. We can expect that the polymer tunneling sensor has the potential to become the basis for the next generation of highly sensitive MEMS-based sensors in many areas.