Insect-model based microrobot with elastic hinges

This paper describes the new concept of making a microrobot based upon insects and its implementation using rigid plates and elastic hinges. One unique feature of an insect's structure is its deformable external skeleton, to which wings and legs are attached, forming a closed-loop mechanism. Frictionless deformation of elastic elements, instead of conventional rotational joints, allows for efficient actuation in the microscale. We propose three-dimensional micromechanisms based on an external skeleton and have fabricated several examples using polysilicon plates and polyimide hinges. By folding the polysilicon plates along the polyimide hinges just like paper, 3D structures can be constructed on silicon wafers. These structures can be easily actuated by electrostatic force. Closed-loop flapping mechanisms have been fabricated and electrostatically actuated to demonstrate the motion of the external skeleton system. Resonant vibration was observed in a frequency range of around 10 kHz. Actuation using electrostatic induction is also considered