Markovian timed Petri nets for performance analysis ofsemiconductor manufacturing systems

A subclass of generalized stochastic Petri nets (GSPNs) with priorities, called Markovian timed Petri nets, are proposed to model semiconductor manufacturing systems that consider process priorities, routing priorities, resource re-entrance, and nonpreemptive operations. Uniformization technique is used to establish both lower and upper bounds of the performance of interest. These bounds are computable using linear programming. Numerical experiments have been conducted to evaluate the accuracy of the bounds using models adapted from real-world systems. The experiments show that the upper bounds are very close to the simulation results. Thus, performance measures can be accurately estimated using these bounds.