Microstructural and electrical properties in textured lead calcium lanthanum titanate thin films deposited on a Pt/Ti/SiO2/Si substrate |
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| Affiliation: | 1. Division of Computational Mechatronics, Institute for Computational Science, Ton Duc Thang University, Ho Chi Minh City, Vietnam;2. Faculty of Electrical & Electronics Engineering, Ton Duc Thang University, Ho Chi Minh City, Vietnam |
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| Abstract: | Textured Ca modified (Pb,La)TiO3 (PLCT) films were deposited on Pt/Ti/SiO2/Si substrates using a metal-organic decomposition (MOD) process. The microstructure of the PLCT thin film was investigated by X-ray diffraction (XRD), atomic force microscopy (AFM), and transmission electron microscopy (TEM). Electric properties were measured using the Pt/PLCT/Pt capacitor structure. The PLCT films exhibit good ferroelectric and dielectric properties. |
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