Herstellung funktionaler organischer Dünnschichten durch Vakuumverdampfung

Depositing of functional organic thin films by vacuum evaporation Material evaporation under high or ultra‐high vacuum conditions has been a well known method of thin film coating since nearly a hundred years. Since discovery of semiconducting organics in the 1970s and 1980s, this technology has been increasingly applied to deposit organic molecular compounds. At the moment especially materials for organic LEDs (OLEDs) and for thin‐film solar cells are in the focus of interest. While organics evaporation makes use of advantages of high‐vacuum coating (purity, compatible processing, masking etc.) there are also dedicated demands on process control coming up. The article describes basic requirements, capabilities of present temperature‐controlled evaporation sources, material‐related features, as well as typical applications.