Wasserstofffreie amorphe Kohlenstoffschichten ‐ abgeschieden durch plasmaaktivierte Hochratebedampfung

Hydrogen free amorphous carbon coatings ‐ deposited with plasma‐activated high‐rate evaporation By using the technology of the plasmaactivated electron beam evaporation we deposited hydrogen free amorphous carbon coatings with deposition rates of up to 100 μm/h. The results of the mechanical and tribological investigations show the potential of these layers for the use in case of wear resistance. Hardnesses of up to 16GPa were proved. The actual state of the characterisation of the coatings is described and the outlook onto possibilities of further optimisation is given.