| 制作重铬酸盐明胶微光学元件的化学裂解刻蚀方法 |
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| 引用本文： | 庞霖,严瑛白,金国藩,邬敏贤,郭履容,陈波.制作重铬酸盐明胶微光学元件的化学裂解刻蚀方法[J].中国激光,2001,28(2):146-150. |
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| 作者姓名： | 庞霖 严瑛白 金国藩 邬敏贤 郭履容 陈波 |
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| 作者单位： | 清华大学精密测试技术与仪器国家重点实验室!北京100084(庞霖，严瑛白，金国藩，邬敏贤)，四川大学物理系信息光学研究中心!成都610064(郭履容)，四川 (陈波) |
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| 基金项目： | 中国博士后科学基金，清华大学机械学院基础基金资助课题 |
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| 摘 要： | 从生物化学和蛋白质的裂解机制出发 ,提出一种新的重铬酸盐明胶 (DCG)浮雕形成方法———化学裂解刻蚀法。由于化学裂解试剂较胰蛋白酶具有少得多的作用位点 ,化学裂解方法比明胶酶蚀方法具有更高的刻蚀分辨率。实验考察表明 ,化学裂解方法可以获得 5 0 0lines mm的刻蚀分辨率。应用化学裂解方法 ,利用投影曝光系统和灰度掩摸 ,制作了单元线宽为 30 μm ,深度为 0 8μm的连续浮雕明胶微棱镜列阵。
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| 关 键 词： | 化学裂解 微光学元件 连续浮雕 重铬酸盐明胶 |
| 收稿时间： | 1999/8/6 |
Chemically Cleaving-etch Method for Fabricating Microoptical Elements in Dichromated Gelatin |
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| PANG Lin,YAN Ying-bai,JIN Guo-fan,WU Min-xian.Chemically Cleaving-etch Method for Fabricating Microoptical Elements in Dichromated Gelatin[J].Chinese Journal of Lasers,2001,28(2):146-150. |
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| Authors: | PANG Lin YAN Ying-bai JIN Guo-fan WU Min-xian |
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| Abstract: | Chemically cleaving-etch method was presented to form relief modulation in gelatin based on the analysis on the cleavage of protein. Thank to the much fewer number of cleavage site for chemical cleavage than that for enzyme, chemical cleavage method was of higher etching resolution and better profile fidelity. The predication was proved to be right and experiments showed that relief modulation resolution was got to 500 lines/mm spatial frequency, which was much higher than enzyme method. With the projection exposure system, a micro-prism array with 30 μm wide and 0.8 μm high cell dimension was fabricated using the chemically cleaving-etch method. |
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| Keywords: | chemical cleavage microoptical elements continuous relief dichromated gelatin |
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