Influence of series resistance in oxide parameter extraction data from accelerated tests

Accelerated reliability tests on thin oxide capacitors can be affected by series resistance effects at high stress conditions. The purpose of this work is to point out such problems both with measurements and simulations. It is shown that breakdown electric field is overestimated. Due to the resulting nonuniform stress, charge to breakdown density is underestimated if the test structure layout is not accurately designed. In any case the series resistance effects can have an undesirable impact on the reliability evaluation of thin dielectrics.