| 具有温度补偿的微细圆柱基MEMS流速传感器研究 |
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| 引用本文： | 黄皓凯,胡致远,叶丰明,杨卓青. 具有温度补偿的微细圆柱基MEMS流速传感器研究[J]. 半导体光电, 2024, 45(1): 29-35 |
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| 作者姓名： | 黄皓凯 胡致远 叶丰明 杨卓青 |
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| 作者单位： | 微米纳米加工技术全国重点实验室;电子信息与电气工程学院 微纳电子系, 上海 200240 |
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| 基金项目： | 国家自然科学基金项目(61974088).通信作者:杨卓青 |
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| 摘 要： | 目前常见的流速传感器由于尺寸原因，只能介入管径较大的管道进行液体流速测量。设计并制造了一种可介入小管径管道的、具有温度补偿功能的圆柱基流速传感器，器件采用旋转投影曝光和微机电系统(MEMS)技术制作而成，包含一个薄膜型加热电阻和一个稳定补偿电阻，基于热阻原理可实现对不同温度流体流速的精确测量。测试结果表明：该流速传感器的温度系数为0.2236%/℃,灵敏度为4.25 mV/(cm·s-1)。研制的圆柱基MEMS流速传感器可在内径为2 mm的管道中对具有一定温度变化的流体进行流速测量，有望应用于工业、生物医学等领域。
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| 关 键 词： | 微机电系统 微细圆柱基底 热阻式 温度补偿 流速传感器 |
| 收稿时间： | 2023-10-18 |
Research on Micro-cylindrical Based MEMS Flow Rate Sensor with Temperature Compensation |
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| HUANG Haokai,HU Zhiyuan,YE Fengming,YANG Zhuoqing. Research on Micro-cylindrical Based MEMS Flow Rate Sensor with Temperature Compensation[J]. Semiconductor Optoelectronics, 2024, 45(1): 29-35 |
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| Authors: | HUANG Haokai HU Zhiyuan YE Fengming YANG Zhuoqing |
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| Affiliation: | National Key Lab.of Advanced Micro and Nano Manufacture Technology;Dept.of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiaotong University, Shanghai 200240, CHN |
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| Abstract: | Due to size reasons, current common flow rate sensors can only be inserted into pipes with larger diameters to measure liquid flow rate. To be placed into a micro pipeline, a cylindrical thermal-resistance micro-electromechanical system (MEMS) flow sensor with temperature compensation was designed and fabricated. It is composed of a heating resistor and a temperature-measuring resistor to measure the flow rate through the working principle of heat loss. The experimental results show that the temperature coefficient of resistance (TCR) is 0.2236%/℃ and the sensitivity was 4.25mV/(cm·s-1). The designed circuits demonstrate an excellent effect of temperature compensation for accurate measuring results. The proposed flow sensor can measure the flow rate in a pipe with an inner diameter of 2mm, and is expected to be applied to the industrial, biomedical and other fields. |
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| Keywords: | MEMS micro-cylindrical substrate thermal-resistance temperature-compensate flow rate sensor |
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