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Biomimetic corrugated silicon nanocone arrays for self-cleaning antireflection coatings |
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| Authors: | Yandong Wang Nan Lu Hongbo Xu Gang Shi Miaojun Xu Xiaowen Lin Haibo Li Wentao Wang Dianpeng Qi Yanqing Lu Lifeng Chi | |
| Affiliation: | 1. State Key Laboratory of Supramolecular Structure and Materials, Jilin University, Changchun, 130012, China 2. National Laboratory of Solid State Microstructures, Nanjing University, Nanjing, 210093, China 3. Physikalisches Institut and Center for Nanotechnology (CeNTech), Westf?lische Wilhelms-Universit?t, D-48149, Münster, Germany |
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| Abstract: | Corrugated silicon nanocone (SiNC) arrays have been fabricated on a silicon wafer by two polystyrene-sphere-monolayer-masked etching steps in order to create high-performance antireflective coatings. The reflectance was reduced from above 35% to less than 0.7% in the range 400–1050 nm, and it remained below 0.5% at incidence angles up to 70° at 632.8 nm for both s- and p-polarized light. The fluorinated corrugated SiNC array surface exhibits superhydrophobic properties with a water contact angle of 164°.  | |
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