| 低阈值连续波工作的2.9 THz量子级联激光器 |
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| 引用本文： | 蒋 涛,湛治强,沈昌乐,杨 宁,邓青华,王雪敏,楚卫东,吴卫东,段素青,唐永建.低阈值连续波工作的2.9 THz量子级联激光器[J].太赫兹科学与电子信息学报,2016,14(5):657-660. |
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| 作者姓名： | 蒋 涛 湛治强 沈昌乐 杨 宁 邓青华 王雪敏 楚卫东 吴卫东 段素青 唐永建 |
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| 作者单位： | 1a.Science and Technology on Plasma Physics Laboratory，Research Center of Laser Fusion，China Academy of Engineering Physics，Mianyang Sichuan 621999，China；1b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Chengdu Sichuan 610200，China,1a.Science and Technology on Plasma Physics Laboratory，Research Center of Laser Fusion，China Academy of Engineering Physics，Mianyang Sichuan 621999，China；1b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Chengdu Sichuan 610200，China,1a.Science and Technology on Plasma Physics Laboratory，Research Center of Laser Fusion，China Academy of Engineering Physics，Mianyang Sichuan 621999，China；1b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Chengdu Sichuan 610200，China,1.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Chengdu Sichuan 610200，China；2.Institute of Applied Physics and Computational Mathematics，Beijing 100088，China,1a.Science and Technology on Plasma Physics Laboratory，Research Center of Laser Fusion，China Academy of Engineering Physics，Mianyang Sichuan 621999，China；1b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Chengdu Sichuan 610200，China,1a.Science and Technology on Plasma Physics Laboratory，Research Center of Laser Fusion，China Academy of Engineering Physics，Mianyang Sichuan 621999，China；1b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Chengdu Sichuan 610200，China,1.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Chengdu Sichuan 610200，China；2.Institute of Applied Physics and Computational Mathematics，Beijing 100088，China,1a.Science and Technology on Plasma Physics Laboratory，Research Center of Laser Fusion，China Academy of Engineering Physics，Mianyang Sichuan 621999，China；1b.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Chengdu Sichuan 610200，China,1.Microsystem and Terahertz Research Center，China Academy of Engineering Physics，Chengdu Sichuan 610200，China；2.Institute of Applied Physics and Computational Mathematics，Beijing 100088，China and Science and Technology on Plasma Physics Laboratory，Research Center of Laser Fusion，China Academy of Engineering Physics，Mianyang Sichuan 621999，China |
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| 基金项目： | 中国工程物理研究院重点实验室基金资助项目(9140C680106150C68295)；中国工程物理研究院发展基金资助项目(2015B0403095) |
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| 摘 要： | 为了获得低阈值连续波工作太赫兹源，采用固源分子束外延技术生长了GaAs/AlGaAs束缚态向连续态跃迁的太赫兹量子级联激光器(QCL)有源区，基于半绝缘-等离子体波导工艺制作了太赫兹量子级联激光器。获得了激光器(腔面未镀高反射膜)的发射光谱和相应的输出特性等性能，其中器件在10 K工作温度、350 mA激励电流下的中心频率为2.93 THz，连续波工作模式的阈值电流密度为156 A/cm2，器件的最大光输出功率为7.84 mW，最高工作温度为62 K。
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| 关 键 词： | 太赫兹 量子级联激光器 连续波 波导 |
| 收稿时间： | 2015/6/20 0:00:00 |
| 修稿时间： | 2015/8/12 0:00:00 |
Fabrication of continuous-wave-work 2.9 THz quantum cascade laser with low threshold |
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| JIANG Tao,ZHAN Zhiqiang,SHEN Changle,YANG Ning,DENG Qinghu,WANG Xuemin,CHU Weidong,WU Weidong,DUAN Suqing and TANG Yongjian.Fabrication of continuous-wave-work 2.9 THz quantum cascade laser with low threshold[J].Journal of Terahertz Science and Electronic Information Technology,2016,14(5):657-660. |
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| Authors: | JIANG Tao ZHAN Zhiqiang SHEN Changle YANG Ning DENG Qinghu WANG Xuemin CHU Weidong WU Weidong DUAN Suqing and TANG Yongjian |
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| Abstract: | In order to obtain low threshold and continuous-wave-work THz source, a terahertz Quantum Cascade Laser(QCL) based on bound-to-continuum intersubband transition is fabricated with semiconductor-plasma waveguide. Then the QCL properties are systematically studied. The lasing frequency is determined to be 2.93 THz and the device shows a Continuous Wave(CW) output power>7.8 mW, with a threshold current density 156 A/cm2, lasing work temperature up to 62 K. |
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