液晶显示器生产中的激光退火和缺陷修复

由于在大面积玻璃基底上制备由多层材料构成的高质量薄膜晶体管象元驱动阵列工艺的复杂性，使有源矩阵液晶显示器（AMLCD）的成品率低、价格高。利用激光对AMLCD进行非晶硅薄膜的退火和电路缺陷的修复，可有效的改善AMLCD的性能，提高成品率和降低成本。本文在介绍了激光对非晶硅薄膜退火和电路缺陷修复常用激光器的特性后，讨论了激光对不同类型缺陷修复的原理和过程。最后，分析比较了不同类型激光退火方法的特点。

Laser annealing and repair processes of active- matrix liquid- crystal displays(AMLCD)

The manufacture of active-matrix liquid-crystal displays(AMLCDs)had been low yield and high cost because the process of fabricat-ing an array of thin film transistors- using multiple layers of different materials on a large glass substrate?is difficult and complicated. Lasers can be used to anneal amorphous silicon films and to repair defects in the mass production of AMLCDs. The result is to reduce process cost, improve reliability and increase effective yield of AMLCDs. An overview is described with emphasis on the principle and characteristics of the laser annealing and repairprocesses. The methods to correct open circuits and shorts circuit of AMLCDs is presented. The merits and demerits of two approaches for excimer an-nealing are also compared.