Focusing waveguide mirror with a tapered edge

We propose a focusing waveguide mirror with a shallow tapered edge in a slab waveguide and demonstrate it by planar processes and wet etching. A light beam 2 mm wide is focused to 6.5 μm full width at half-maximum at a wavelength of 0.6328 μm. A reflectivity of higher than 90% at the tapered edge is obtained. The inclination ratio of the tapered mirror edge is 1:90. Fairly good correspondence between measured and calculated focused spot sizes is obtained.