| 具有力传感器的纳米加工探针的设计 |
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| 引用本文： | 高伟,GENDA Satoshi,KUDO Yasuto,KIYONO Satoshi,Patten A John.具有力传感器的纳米加工探针的设计[J].纳米技术与精密工程,2005,3(4):307-313. |
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| 作者姓名： | 高伟 GENDA Satoshi KUDO Yasuto KIYONO Satoshi Patten A John |
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| 作者单位： | 日本东北大学工程学院纳米机械系,仙台980-8579,日本;美国西密歇根大学制造工程系制造研发中心,卡拉马祖49008,美国 |
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| 基金项目： | Supported by a grant-in-aid from the JSPS（ 15360063 ）and the financial assistance of JSPS （Grant PU02210 ）. |
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| 摘 要： | 给出了一种用于复杂表面形状精密纳米加工的探针装置．该探针由一个高速可控的金刚石切割单元（FTC单元）和一个高灵敏度的压电式力传感器组成．而FTC单元由一个单点金刚石切割工具和一个压电陶瓷晶体（PZT）驱动器构成．压电陶瓷晶体（PZT）驱动器可对与切削量相对应的金刚石工具的Z向位置进行高速控制，从而实现加工复杂表面形状的目的．加工中的切削力是反映切削进程的重要指标，可由联结于FTC单元的高灵敏度力传感器进行测量．比对了用于联结力传感器和FTC单元的两种设计方法．
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| 关 键 词： | 测量 精密仪器 传感器 纳米加工 高速工具控制 力传感器 |
| 文章编号： | 1672-6030（2005）04-0307-07 |
| 收稿时间： | 2005-11-24 |
| 修稿时间： | 2005年11月24 |
Design of a Nanofabrication Probe with a Force Sensor |
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| GAO Wei,GENDA Satoshi,KUDO Yasuto,KIYONO Satoshi,Patten A John.Design of a Nanofabrication Probe with a Force Sensor[J].Nanotechnology and Precision Engineering,2005,3(4):307-313. |
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| Authors: | GAO Wei GENDA Satoshi KUDO Yasuto KIYONO Satoshi Patten A John |
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| Abstract: | This paper describes a probe for precision nanofabrication of complex surfaces. The probe is composed of a fast tool controll diamond cutting unit (FTC-unit) and a highly sensitive piezoelectric force sensor. The FTC-unit consists of a single point diamond cutting tool and a PZT actuator. Complex surfaces can be generated through fast control of the Z-position of the tool, which corresponds to the depth of cut, by the PZT actuator. The cutting force, which is an important factor reflecting the condition of the cutting process, is detected by the force sensor coupled into the FTC-unit. Two structures for coupling the force sensor to the FTC-unit are designed and compared. |
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| Keywords: | measurement precision instrument sensor nanofabrication fast tool control force sensor |
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