A hybrid capacitive pressure and temperature sensor fabricated by adhesive bonding technique for harsh environment of kraft pulp digesters

We have developed a compensated capacitive pressure and temperature sensor for kraft pulp digesters (pH 13.5, temperatures 25–175°C reaching a local maximum of 180°C and pressures up to 2 MPa). The gauge capacitive pressure sensor was fabricated by bonding silicon and Pyrex chips using a high temperature, low viscosity UV (ultraviolent) adhesive as the gap-controlling layer and heat curing adhesive as the bonding agent. A simple chip bonding technique, involving insertion of the adhesive into the gap between two chips was developed. A platinum thin-film wire was patterned on top of a silicon chip to form a resistance temperature detector (RTD) with a nominal resistance of 1,500 Ω. A silicon dioxide layer and a thin layer of Parylene were deposited to passivate the pressure sensor diaphragm and the sensors were embedded into epoxy for protection against the caustic environment in kraft digesters. The sensors were tested up to 2 MPa and 170°C in an environment chamber. The maximum thermal error of ±1% (absolute value of ±20 kPa) full scale output (FSO) and an average sensitivity of 0.554 fF/kPa were measured. Parylene-coated silicon chips were tested for a full kraft pulping cycle with no signs of corrosion.